Equipment Monitoring

ESD Grounding Resistance Monitoring System

ESD Grounding Resistance Monitoring System
At a glance

24/7 automatic measurement of equipment grounding resistance with instant alarms and full history, so ESD protection actually works on the line.

Machines in electronics manufacturing and precision production lines build up static charge through friction and material properties. If equipment is not properly grounded, that charge can disturb processes and skew test data — and worse, damage components, lower yield and reduce capacity. Equipment is therefore designed with an electrostatic discharge path to ground, and continuously monitoring the resistance of that path is the key indicator of proper grounding.

Our ESDR Measurement System detects grounding status in real time, measures automatically, checks each reading against its limit, alerts immediately on any abnormality and keeps complete records for traceability. For lines that need ESD protection, it cuts manual inspection work and makes sure protection is really in place.

Automated measurement

Periodic, standardised measurement cycles covering 0.005 Ω to 20 Ω micro-resistance, reducing manual patrols.

Real-time alarms

Live readings with alarm outputs on abnormal values to improve line stability and uptime.

Self-calibration

Built-in precision reference resistors support self-calibration and external verification, lowering maintenance cost while keeping accuracy.

Snapshot reports

Store and review up to 1 million records for history tracking and failure-mode analysis.

Typical resistance limits by application

LimitApplication / equipment locationCommon referencesPurpose
< 0.1 ΩProcess fixtures to ground (plating fixtures, RF chambers), electrostatic chuck conductive layersSEMI E176, micro-ohmmeter practice (Hioki, Chroma)Stable conduction at high frequency / high current; avoids process non-uniformity or faults from resistance drift
< 1 ΩTouchable metal enclosures, flip arms, robot arms, ESD ground wiresANSI/ESD S6.1, SEMI S2, IEC 61010Operator safety and a reliable discharge path; prevents floating grounds and ESD events
< 5 ΩSliding carbon brushes, spring contacts, conveyor end pointsEquipment acceptance criteria, internal continuity guidelinesReliable conduction while keeping mechanical flexibility for rotating or intermittent contacts
< 10 ΩNon-critical ground points: machine sockets, general frames, ESD workstation test pointsANSI/ESD S6.1 (maximum), IPC-A-610 recommendationMost tolerant limit for non-critical points; avoid for high-speed or sensitive areas

Installation process

Installation process

  1. Identify measurement points on the machine
  2. Install the measurement system
  3. 24/7 automated measurement
  4. Instant alarms on degradation
  5. Annual in-line calibration

Specifications

ItemSpecification
Channels32 channels standard (expandable)
Measurement method4-wire Kelvin connection, one-key automatic measurement
Ranges & resolution0.1 Ω, 1 Ω, 5 Ω, 10 Ω; resolution down to 0.001 Ω
Self-calibrationThree built-in reference resistors (0.1 Ω / 1 Ω / 10 Ω), 0.1% accuracy, automatic calibration
LoggerConfigurable interval (every 5 seconds to once a day), 3+ months of history
Fault & alarm recordsLogs abnormal channels and times for alarm root-cause review
Interface5" LCD touchscreen, Chinese / English UI
Data exportCSV export, USB download, remote query
CommunicationUSB (CDC/HID), RJ45 (Modbus TCP, optional), RS485 (Modbus RTU, optional)
Calibration test pointsExternal precision instruments supported; 0.1 Ω / 1 Ω / 10 Ω test points provided
StorageAt least 3 months of data (depends on logging interval)
Power supplyDC 12 V – 24 V

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