At a glance
A smart storage rack with AGV handling, MES integration and RFID tracking for high-density, unmanned FOUP storage.
A modular smart rack that supports AGV handling and MES integration, designed for simplicity, automation and traceability. RFID modules provide precise tracking for high-density, unmanned storage, and the cleanroom-grade structure improves line efficiency and wafer handling quality while leaving room for future expansion.
Features
- High-density storage — about 30 slots per rack, supporting 300 mm FOUPs or custom sizes.
- Simple management — an operator interface and sensor confirmation manage every carrier in and out, making the workflow semi-automated.
- RFID integration — RFID modules identify and record wafer carrier information in real time.
- Real-time access records — every placement or removal logs part number, time, operator, location and status.
- Mis-placement protection — the system alerts immediately if a carrier is put in the wrong slot.
- MES support — integrates with existing customer systems and uploads carrier status in real time.
Slot status indicators
Indicator light status
